Semiconductor Manufacturing Process

Direct circulation type chemical isothermal device indispensable for wet process by contamination free in-line type cooling/heating unit.

Chemical circulator performs precision temperature control of chemicals used for RCA cleaning and wet etching. This is widely employed as an element indispensable for the wet process of semiconductor manufacturing. This Chemical Circulator is newly introduced to meet the needs for an increase in cleanness along with recent diversification of chemicals and higher megabits. (Note)For use with high-temperature chemicals, the CS-Heater is recommended.

Features

• The wet material for heat transfer in contact with the liquid in the cooling/heating unit is made from high-purity glassy carbon and is free from contamination with dissolved metallic ions. No surface protection film is necessary. Performance deterioration due to peeling of the film is therefore eliminated.
• The seal is constructed to prevent direct contact of the rubber O ring with the liquid.Accordingly,it is not necessary to select the seal material as using each of the acid or alkaline chemicals.
• Thermoelectric heating/cooling is appropriate for temperature control to around room temperature with high accuracy.
• This equipment conforms with the International Protection(IP) code 31.
• A leak sensor for chemical liquid and overheat/overcool temperature sensors,each for chenmical liquid and cooling water,give safety for operation.

Applications

1. Chemicals temperature control for the wet process of semiconductor manufacturing: RCA cleaning liquid, Etching liquid, Development liquid of the lithography process.
2. Chemicals temperature control in other fields: Plating liquid, various surface treatment.

Specification